Determination of the three-dimensional lattice mismatch in quaternary III-V liquid phase epitaxial layers using simultaneous Bragg diffraction of x rays
نویسنده
چکیده
Because multiple simultaneous reflection ofx rays is very sensitive to lattice deformation, the sixbeam, (000) (006) (224) (222) (224) (222) multiple reflection was used to record simultaneously the information about the lattice mismatch of[ool] InGaAsP materials using a divergent x-ray source. The lattice mismatches in directions parallel and perpendicular to [001], determined from a single divergent-beam photograph, increase as the As concentration in liquid composition X ~s increases. The procedure was used without difficulty for X 6. as low as 0.0007 and X ~s in the range 0.006--0.01. PACS numbers: 68.55. + b, 61.10.Fr
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